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CHAPTER 3
Opto-Electronic Integration of ick-
Electrode DEP Microuidic Chip
3.1 INTRODUCTION
e multi-electrode structure of thick-electrode DEP overcomes the limitation of electric eld
attenuation and small working range of the 2D planar electrodes, and enables single-cell 3D rota-
tion. With the development of MEMS technology, the thick-electrode structure can be more easily
combined with other technologies to realize multi-function. In order to expand the functions of the
multi-electrode structure of thick-electrode DEP, this chapter redesigns the single-cell 3D rotation
chip structure, integrates dual-beam optical stretcher into the chip, and realizes multi-parameter
measurement of single cells.
Single-cell multi-parameter measurement
Single cells are highly heterogeneous and can be distinguished by cell markers [172, 173]. Cell
markers refer to biochemical indicators that can objectively measure and evaluate cells [174, 175].
Examination of cell markers with certain specicity plays an important role in the identication,
early diagnosis and prevention of diseases, and therapeutic monitoring. At present, the measure-
ment and characterization of cell markers has gradually become an important hot spot in research.
Cell markers are classied into extrinsic biochemical markers [176] and intrinsic markers [177].
e status of cells can be identied by external biochemical markers (e.g., uorescent pigments,
quantum dots, magnetic beads, etc.).
e biophysical markers of cells are intrinsic properties and can be clearly distinguished
without label, such as size, shape, density, mechanical, and electrical properties. Intrinsic markers
are useful for measuring cell characteristics without biochemical markers. Moreover, similar to the
external markers, single intrinsic marker is often insucient to characterize the cell. To increase
specicity, the current research direction is to simultaneously measure multiple intrinsic markers
of single cells.
As intrinsic markers of cells, mechanical properties of cells can reect the cytoskeletal status
of cells. e cytoskeleton not only provides the mechanical strength of cells, but also regulates many
important cellular functions. e skeleton content and structural changes of a cell can be reected
in the overall mechanical properties of cells. For example, measurements of morphological changes
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