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2Jenoptik Mikrotechnik http://www.jo-mt.de 2008

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6 H. Becker, U. Heim, Hot embossing as a method for the fabrication of polymer high aspect ratio structures Sensors and Actuators 83 2000, 130-135

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8 Emile Berliner Process of producing records of sound. United States Patent No. 382,790, May 1888.

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11 M. Harmening, W. Bacher, P. Bley, A. El-Kholi, H. Kalb, B. Kowanz, W. Menz, A. Michel, J. Mohr, Molding of three dimensional microstructures by the liga process Proc. MEMS '92 1992 IEEE Travemünde, Germany, 202-

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13 W. Kaiser, Ueber Schallplattenfabrikation Kunststoffe 1 7 1911

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15 David L. Morton Jr., Sound Recording: The Life Story of a Technology 2004 Greenwood Press

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