Index
Note: Page numbers followed by f indicate figures and t indicate tables.
A
Acoustic disturbance
281–290design examples
286–290mixing in microchannels
286–287vibration models of square membrane
285fActive micromixers
3, 4f, 239acoustic disturbance
281–290dielectrophoretic disturbance
262–263electrohydrodynamic disturbance
259–262electrokinetic disturbance
263–275flow instability in microchannels
239–240magnetohydrodynamic disturbance
275–281pressure-driven disturbance
240–259thermal disturbance
291Adhesive bonding
155Advection
36Advection cycle
38–39Alkali hydroxide etchants
121Ammonium hydroxide etchants
121Angiogenesis
335–336Anodic plasma etching (APE)
124Area-preserving transformation
39Aspect ratio
306Atmospheric-pressure chemical vapor deposition (APCVD)
116Axial diffusion
28Axial dispersion
1–2Axon guidance
334–335AZ4562 resist
137AZ9260 resist
137B
Biological actuators
246Bond number
220Bosch process
124–125Brown, Robert
23Brownian motion
22–23Bulk coupled model, for electrohydrodynamic instability
259Bulk micromachined microchannels and nanochannels
125–127C
Cancer metastasis
334Capillary number
220Cationic polymerization
327Ceramic tapes
281Chaotic advection, micromixers based on
195Chapman–Enskog theory
10–11Characterization techniques
imaging techniques
confocal laser scanning microscopy
301–302digital images, acquisition and processing
303–307two-dimensional fluorescence microscopy
299–301two-dimensional optical microscopy
295–299Charge relaxation time
246Chemical actuators
244–245Chemical dry etching
124Chemical vapor deposition (CVD)
116Clausius–Mossotti factor
262Colloidal ferrofluid
66Colored particle tracking method (CPTM)
215–216Complex permittivity
262Computational transport processes
73examples
92–109droplet driven by electro-osmotic flow in enclosure, mixing within
104–107droplet flowing in straight microchannel, mixing within
97–100droplet flowing through a micro-u-bend, mixing within
100ferrofluid droplet, mixing within
107–109lid-driven microcavity, mixing in
92–96micro-enclosure, mixing in
92straight microchannel, mixing in
96three thermocapillary merged droplets, mixing in
101–104winding microchannels, mixing in
96mathematical formulation
75–82electric and magnetic fields
77–79energy transport
77fluid transport
76species transport
75–76two-fluid flows
80–82problem description
75Conductivity gradient, electrokinetic instability caused by
264–267Conservation kf energy
21–22Conservation of mass
14–15Conservation of momentum
15–21Conservation of species
22Continuity equation
14–15Continuum level
14–22conservation of energy
21–22conservation of mass
14–15conservation of momentum
15–21conservation of species
22Continuum model
10Continuum surface force model
80–81Coupling reactions
324Cylindrical capillary, electrokinetic flow in
60–61Czocharalski method (CZ method)
119–120D
Damköhler number
71Dean number
45–46Decomposition temperature
137–138Degenerate modes
285Dehydration reactions
326Diamond thin films
130–131Diffusion/convection equation
22Diffusion coefficient
24–27of electrolytes
26–27in gases
24–25in liquids
25–26in Poiseuille flow between two parallel plates
32Dimensionless pressure gradient
49Direct bonding
154–155Droplet-based lab-on-a-chip
50Droplet-based mixing in straight channel
231–232Dry etching
123–125Duroplastic materials
138E
Eddy diffusion
1–2Elastomeric polymer
138Electric double layer (EDL)
225–227Electric field variation, electrokinetic instability caused by
267–268Electrocapillary actuators
245Electrochemical actuators
244Electrochemical machining (ECM)
152Electrohydrodynamic (EHD) disturbance
259–262active micromixer with different electrode configurations
261fElectrohydrodynamic force
245Electrokinetic disturbance
263–275in axial direction
271fconductivity gradient, instability caused by
264–267electric field variation, instability caused by
267–268micromixer with staggered herringbone electrodes
273fof two streams with different ionic concentration
266fzeta potentials variation, instability caused by
268–270Electrokinetic effects
55–66electroosmosis
55–64debye layer
55–57electrokinetic flow between two parallel plates
58–59electrokinetic flow in cylindrical capillary
60–61electrokinetic flow in rectangular microchannel
61–63electroosmotic transport effect
57–58Ohmic model for electrolyte solutions
63–64electrophoresis
64–65dielectrophoresis (DEP)
65–66Electrokinetic flow
dimensionless time-dependent velocity profile of
268fsequential segmentation in
272Electrolytes, diffusion coefficient of
26–27Electrolyte solutions, Ohmic model for
63–64Electron beam evaporation (EBE)
118Electroosmosis
55–64debye layer
55–57electrokinetic flow between two parallel plates
58–59electrokinetic flow in cylindrical capillary
60–61electrokinetic flow in rectangular microchannel
61–63electroosmotic transport effect
57–58Ohmic model for electrolyte solutions
63–64Electroosmotic mobility
57Electrophilic aromatic substitution reactions
323Electrophoretic mobility
64–65Electrostrictive force
245Elimination reactions
323Elliptic island
251Elliptic orbits
39Energy transport
77Epi-micromachining/near-surface micromachining
127Eteroclinic orbit
39Ethylene diamine pyrochatechol (EDP)
121Eutectic bonding
155Evaporation
118F
Fabrication technologies
113metallic microtechnologies
150–153focused ion beam micromachining
152LIGA
151–152metals as substrate materials
150–151micro-electro-discharge machining
152powder blasting
152–153ultrasonic micromachining
153Fast prototyping of micromixers with soft lithography
145Ferromagnetic nanoparticles
66–67First law of thermodynamics
21–22Floating zone method (FZ-method)
119–120Flow helical pipes
14–22Fluid flow, in microscale
68–71Fluid transport
76Fluorescence microscopy, two-dimensional
299–301Focused ion beam micromachining
152Fourier number
69Free radical polymerization (FRP)
326–327Friedel–Crafts reactions
323G
Gas–liquid reactions, micromixers
324–326addition reactions
326dehydration reactions
326substitution reactions
325–326Gas–liquid system
2Gas viscosity estimation by kinetic theory
11–13Glass
126Glass–glass bonding
154Glass transition temperature
137–138Gouy–Chapman layer
55–56H
Hele–Shaw flow
249Homoclinic orbit
39Homopolymer
137–138Hot embossing
142Hydrodynamic focusing and sequential segmentation
181–186Hydrogels
244–245Hyperbolic orbit
39I
Image resolution
306–307Image sensors
303–305Imaging techniques
confocal laser scanning microscopy
301–302digital images, acquisition and processing
303–307two-dimensional fluorescence microscopy
299–301two-dimensional optical microscopy
295–299Immiscible liquids
2Immune response
334Ingenhousz, Jan
23Injection molding
140Interferometric lithography
127Isotropic etching
120L
Laminar flow condition
3Langevin equation
23–24Laser machining
146–147Lennard–Jones characteristic energies/diameters
11tLevel-set function
80–81Lewis number
69Lippmann equation
225–227Liquid–liquid reactions, micromixers
322–324addition and elimination reactions
323coupling reactions
324electrophilic aromatic substitution reactions
323nucleophilic substitution reactions
322oxidation and reduction reactions
324Living radical polymerization (LRP)
327Lorentz force
275Low-pressure chemical vapor deposition (LPCVD)
116M
Macromixing
1Magnetically enhanced reactive ion etching (MERIE)
124Magnetic effects
66–68Magnetite precipitation
67Magnetohydrodynamic (MHD) disturbance
275–281active micromixer based on
275fdesign examples
281field velocity
277fstraight channel configuration
275–276Magnetohydrodynamics (MHD)
Magnetorheological fluid (MRF)
66Ma-P100 resist
137Mapping function
38–39Marangoni force
102Mass transport, in microscale
9electromagnetic effects
68magnetic effects
66–68molecular diffusion
22–27diffusion coefficient
24–27random walk and Brownian motion
22–23Stokes–Einstein model of diffusion
23–24viscoelastic effects
53–55Mathematical formulation
75–82electric and magnetic fields
77–79energy transport
77fluid transport
76species transport
75–76two-fluid flows
80–82Maxwell’s equations
77–78Mean-fluctuation method
31–32Mesomixing
1Metallic microtechnologies
150–153focused ion beam micromachining
152LIGA
151–152metals as substrate materials
150–151micro-electro-discharge machining
152powder blasting
152–153ultrasonic micromachining
153Metals as substrate materials
150–151Microcontact printing
144Microcrystalline diamond (MCD)
130Microdevices
114Microdroplets
active control of
225–230Micro-electro-discharge machining
152Microelectromechanical systems (MEMSs)
114Micromixers
114application in chemical and biochemical analysis
biological assays
334–336concentration measurement
329–330improvement of
330–333purification and preconcentration
333–334application in chemical industry
fuel processing
328–329gas–liquid reactions
324–326liquid–liquid reactions
322–324micromixers as microreactors
321–322particles and emulsions
327–328polymerization reactions
326–327definition of
1as microreactors
5–7Micromixing
1Micromolding
144–145Microreactors
321–322Microscale, multiphase systems in
219–230microdroplet, active control of
225–230passive droplet formation
220–223Microtechnologies
metallic
polymeric
silicon-based
Microtransfer molding
144–145Miniaturization
114Mixing
1within droplet driven by electro-osmotic flow in enclosure
104–107within droplet flowing in straight microchannel
97–100within droplet flowing through a micro-u-bend
100within ferrofluid droplet
107–110in lid-driven microcavity
92–96in macroscale
1–2in micro-enclosure
92in microscale
1–5in serpentine microchannel
99fin straight microchannel
96in three thermocapillary merged droplets
101–104in winding microchannels
96Mixing chamber
289Mixing streams, focusing of
177–186, 177fwith different viscosities
179–181hydrodynamic focusing and sequential segmentation
181–186with same viscosity
177–179Mixing time
3–5Molecular beam epitaxy (MBE)
118Molecular diffusion, micromixers based on
163focusing of mixing streams
177–186, 177fwith different viscosities
179–181hydrodynamic focusing and sequential segmentation
181–186with same viscosity
177–179gradient generator based on diffusive mixing
187–193segmentation based on injection
175–177Molecular dynamics (MD)
13–14Molecular model
10O
Ohm’s law
275–276One-dimensional dispersion
31fOpen circuit potential (OCP)
122Optical microscopy
Orbit
39Oxidation and reduction reactions
324Oxygen plasma
139P
Pathline
36Parallel lamination
69–70Parallel lamination micromixer
163–171, 166f, 167f, 168f, 169fbased on pure molecular diffusion
163–169Partial differential equations (PDEs)
74Parylene
148–149Parylene C
148–149Parylene D
148–149Parylene N
148–149Passive droplet formation
220–223Passive mixers with obstacles
199–201Physical–chemical etching
124Physical dry etching
123Physical vapor deposition (PVD)
117–118Piezoelectricity
243Planar interdigitated electrodes (IDEs)
333–334Plasma-enhanced chemical vapor deposition (PECVD)
116Plastics
137–138Pneumatic actuators
242Polyethylene carbonate (PEC)
149Polyethylene terephthalate (PET)
202–203Polyethylene terephthalate glycol (PETG)
214Polyimide
148Polymeric bulk micromachining
137–147fast prototyping of micromixers with soft lithography
145hot embossing
142injection molding
140laser machining
146–147soft lithography
142–145Polymeric micromixers
138Polymeric microtechnologies
132–149Polymerization reactions
326–327cationic polymerization
327free radical polymerization (FRP)
326–327living radical polymerization (LRP)
327Polymer–polymer bonding
154Polymethylmethacrylate (PMMA) resist
132–133Polynorbornene (PNB)
149Polypropylene carbonate (PPC)
149Polysilicon
128–130, 119–120polysilicon surface micromachining
128–129fabrication of microchannels with silicon surface micromachining
129–130Polyvinylidene fluoride (PVDF)
243Powder blasting
152–153Preconcentration, DNA
333–334Pressure-driven disturbance
240–259hydrodynamic instability
247–248model of active mixer with
247fpressure generation, actuation concepts for
240–246pulsed source–sink chaotic advection
249–252Problem description
75Projection printing system, resolution of
115–116Proximity printing, resolution of
115Pulsed source–sink chaotic advection
249–252active micromixer based on
257ffirst-in-last-out concept
257stream lines in bounded domain
250fstream lines in unbounded domain
250fPurification, DNA
333–334R
Reaction injection molding (RIM)
140Reaction time
3Reactive evaporation (RE)
118Reactive ion etching (RIE)
124Relaxation time
170Replica molding
144–145S
Schmidt number
68Sedimentation potential
55Segmentation based on injection
175–177Segmented flows
219–220Serratia marcescens
246Shape memory polymers (SMPs)
132Shear surface
55–56Silicon-based microtechnologies
114–131chemical vapor deposition (CVD)
116diamond thin films
130–131physical vapor deposition (PVD)
117–118silicon carbide
131single-crystalline silicon
119–127bulk micromachined microchannels and nanochannels
125–127dry etching
123–125epi-micromachining/near-surface micromachining
127wet etching
120–123spin coating
118–119thermal oxidation
116Silicon carbide
131Silicon dioxide
116Silicon direct bonding
154Silicon fusion bonding
Silicon on isolator (SOI) technology
252Single-crystalline silicon
119–127bulk micromachined microchannels and nanochannels
125–127dry etching
123–125epi-micromachining/near-surface micromachining
127wet etching
120–123Single-molecule model
54Slanted groove micromixer (SGM)
211–214Smoluchowski velocity
57Solid–liquid system
2Solution procedure
82–88finite volume formulation
82–88level-set method
91–92of Navier–Stokes equations
90solution algorithm
88Solvent-assisted micromolding
144–145Spark-assisted chemical engraving (SACE)
152Spatiotemporal resonance
247Species transport
75–76Spin coating
118–119Split-and-recombine (SAR) concept
171Stability analysis
247Staggered oriented mixers (SORs)
217Stem cells
335Stern layer
55–56Stoke’s penetration depth
267–268Stokes–Einstein equation
25–26Stokes–Einstein model of diffusion
23–24Streakline
37Streaming potential
55Substitution reactions
325–326Substrate materials, metals as
150–151Surface coupled model, for electrohydrodynamic instability
259Surface effects versus volume effects
2Surface properties
138Swelling
244T
Taylor–Aris dispersion
182–183Tetramethyl ammonium hydroxide (TMAH)
121–122Texas Instruments
114–115Thermal-expansion actuators
242Thermal oxidation
116Thermocapillary actuation
227Thermocapillary actuator
245Thermocapillary effect
102Thermoplastic materials
138Thermopneumatic actuators
242Thick-film polymeric materials
132–137AZ4562 resist
137AZ9260 resist
137Ma-P100 resist
137polymethylmethacrylate (PMMA) resist
132–133Three-dimensional analysis
34–36Trajectory
seePathline
Transformation
38–39Transmission-coupled plasma etching (TCPE)
124Transport phenomena
10–22continuum level
14–22conservation of energy
21–22conservation of mass
14–15conservation of momentum
15–21conservation of species
22molecular level
10–14Transport processes, prediction of
Triode reactive ion etching (TRIE)
124T-type micromixer
274Two-dimensional analysis
28–34Two-fluid flows
80–82V
Vacuum thermal evaporation (VTA)
118Verifications and validations
88–92general transient convection diffusion equation, solution procedure of
89level-set method, solution procedure of
91–92Navier–Stokes equations, solution procedure of
90Viscoelastic effects
53–55viscoelastic fluids
54Viscosity of water, determining
13Volume effects versus surface effects
2Volume-preserving transformation
39Y
Young equation
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