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by Regina Luttge
Microfabrication for Industrial Applications
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Title page
Table of Contents
Micro & Nano Technologies Series
Copyright
Preface
Author Biography
Chapter 1. Introduction
1.1 Philosophy of Micro/Nanofabrication
1.2 The Industry–Science Dualism
1.3 Industrial Applications
1.4 Purpose and Organization of this Book
REFERENCES
Chapter 2. Basic Technologies for Microsystems
2.1 Photolithography
2.2 Thin Films
2.3 Silicon Micromachining
2.4 Industrially Established Non-Silicon Processing
2.5 Conclusions
REFERENCES
Chapter 3. Advanced Microfabrication Methods
3.1 LIGA
3.2 Deep Reactive Ion Etching
3.3 Micro-Ceramic Processing
3.4 Speciality Substrates
3.5 Advanced Non-Silicon and Silicon Hybrid Devices
3.6 Planar Lightwave Circuits
3.7 Fabrication Example of an Integrated Optical Device
3.8 Integrated Optics in the MST Foundry Service Industry: A Case Study
3.9 Conclusions
REFERENCES
Chapter 4. Nanotechnology
4.1 Top-Down, Bottom-Up
4.2 Nanomaterials
4.3 Where Are We?
4.4 Where to Go from Here?
REFERENCES
Chapter 5. Micromechanical Transducers
5.1 Application Fields
5.2 Overview of Materials
5.3 Thick and Thin Film Hybrid Materials
5.4 Microactuation
5.5 Packaged Sensors
5.6 Silicon as a Mechanical Material in Resonant Microdevices
5.7 Information Society
5.8 Conclusions
REFERENCES
Chapter 6. Chemical and Biological Sensors at Component and Device Level
6.1 Application Field
6.2 Sensor Principles for the Collection of (Bio)Chemical Information
6.3 Integrated chemFET Device: Case Study of a Semiconductor-Based pH Sensor Development
6.4 Integrated Clinical Diagnostics: A Medical Application for Electrochemical Sensor Arrays
6.5 Conclusions
REFERENCES
Chapter 7. Microfluidic Components, Devices and Integrated Lab-on-a-Chip Systems
7.1 Application Fields
7.2 Microfluidic Components
7.3 Controlled Transport by Diffusion
7.4 Integration for Microfluidic Transport, Sensing and Dispensing
7.5 Lab-on-a-Chip
7.6 Device-to-World Connections: The MATAS Concept
7.7 From the Lab Bench to Industry: Microchip Capillary Electrophoresis
7.8 Conclusions
REFERENCES
Chapter 8. Microfabrication for Novel Products in Drug Delivery: An Example
8.1 Microneedle Research at University of Twente and its Spin-Off
8.2 MNA-4-Insulin: A Brief Evaluation
8.3 Conclusions
REFERENCES
Chapter 9. Reflective Comments and Conclusions
9.1 Environmental Aspects
9.2 Health Aspects of Nanoparticles
9.3 Conclusions
REFERENCES
Index
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Microfabrication for Industrial Applications
Regina Luttge
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