Table of Contents
Micro & Nano Technologies Series
1.1 Philosophy of Micro/Nanofabrication
1.2 The Industry–Science Dualism
1.4 Purpose and Organization of this Book
Chapter 2. Basic Technologies for Microsystems
2.4 Industrially Established Non-Silicon Processing
Chapter 3. Advanced Microfabrication Methods
3.5 Advanced Non-Silicon and Silicon Hybrid Devices
3.7 Fabrication Example of an Integrated Optical Device
3.8 Integrated Optics in the MST Foundry Service Industry: A Case Study
Chapter 5. Micromechanical Transducers
5.3 Thick and Thin Film Hybrid Materials
5.6 Silicon as a Mechanical Material in Resonant Microdevices
Chapter 6. Chemical and Biological Sensors at Component and Device Level
6.2 Sensor Principles for the Collection of (Bio)Chemical Information
6.3 Integrated chemFET Device: Case Study of a Semiconductor-Based pH Sensor Development
6.4 Integrated Clinical Diagnostics: A Medical Application for Electrochemical Sensor Arrays
Chapter 7. Microfluidic Components, Devices and Integrated Lab-on-a-Chip Systems
7.3 Controlled Transport by Diffusion
7.4 Integration for Microfluidic Transport, Sensing and Dispensing
7.6 Device-to-World Connections: The MATAS Concept
7.7 From the Lab Bench to Industry: Microchip Capillary Electrophoresis
Chapter 8. Microfabrication for Novel Products in Drug Delivery: An Example
8.1 Microneedle Research at University of Twente and its Spin-Off
8.2 MNA-4-Insulin: A Brief Evaluation
Chapter 9. Reflective Comments and Conclusions