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by Milton Ohring
Materials Science of Thin Films, 2nd Edition
Cover image
Title page
Table of Contents
Copyright
Foreword to First Edition
Preface
Acknowledgments
Historical Perspective
Chapter 1: A Review of Materials Science
Chapter 2: Vacuum Science and Technology
Chapter 3: Thin-Film Evaporation Processes
Chapter 4: Discharges, Plasmas, and Ion–Surface Interactions
Chapter 5: Plasma and Ion Beam Processing of Thin Films
Chapter 6: Chemical Vapor Deposition
Chapter 7: Substrate Surfaces and Thin-Film Nucleation
Chapter 8: Epitaxy
Chapter 9: Film Structure
Chapter 10: Characterization of Thin Films and Surfaces
Chapter 11: Interdiffusion, Reactions, and Transformations in Thin Films
Chapter 12: Mechanical Properties of Thin Films
Appendix
Index
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