Index
A
AAO nanoimprinting, 111
ablation techniques, 42–4
accelerometers, 157
active microvalves, 207–10
additive processing, 74–5
advanced microfabrication methods, 55–89
LIGA concepts, 57–8
micro-ceramic processing, 59–70
non-silicon hybrid devices, 71–4
planar lightwave circuits, 74–80
reactive ion etching, 59
silicon hybrid devices, 71–4
speciality substrates, 71
Advanced Silicon Etching (ASE), 59
agriculture, 182
ALD see atomic layer deposition
aluminium etch, 22
aluminium support frames, 162–3
amorphous materials:
micromechanical transducers, 154
photostructurable glass, 36–8
planar lightwave circuits, 77
anisotropic etching:
micro-mechanical actuation, 208
aqueous microneedle conduits, 252
Argon ion lasers, 113
artificial oxide nanoarrays, 123–4
artificial oxygenation, 129
ASE (Advanced Silicon Etching), 59
atomic layer deposition (ALD), 170–1
atom lithography, 114
automatic pipettes, 211
automotive sensor technology, 155
B
bacteria, 129
BARC see bottom antireflection coating
basic microsystem technologies, 13–54
non-silicon processing, 33–49
photolithography, 14–17
silicon micromachining, 21–32
thin films, 17–21
batch processing of packaged sensors, 157
batch-replication, 260–1
batch-type microfluidic approaches, 202–3
bimetallic actuator structures, 209–10
bimorph strips, 156
bioceramics, 61
biochemical sensor information, 183–9
biochip technology, 191–2
bio-inspired oxide nanoarrays, 129–30
biological sensors, 179–98
application fields, 180–2
biochemical information, 183–9
cell-based types, 192–5
development methodology, 188–9
electrochemical arrays, 190–5
integrated chemFET devices, 189–90
integrated clinical diagnostics, 190–5
MST foundry service industry, 84
pH sensors, 189–90
templated nanoarrays, 110
biomedical devices (nanomaterials), 124
biomolecular recognition, 151–2
bio-nanoarrays, 109
bioredox, 129
bio-templated oxide nanoarrays, 129–30
blood:
microfluidics, 204
sensors, 181–2
BOE (buffered oxide etch), 22
bolus injections, 257
bonding-and-etchback techniques, 71
BOSCH pressure sensors, 151
boss-features, 162
bottom antireflection coating (BARC), 117–18
BOX see buried oxide layers
Braille displays, 209
bromine-based gas mixtures, 26
buffered oxide etch (BOE), 22
buried oxide layers (BOX), 71
C
CAD (computer aided design), 16
cantilever components, 162–3
capacitive packaged sensors, 157
see also microfluidics
capillary electrophoresis (CE), 219–28
carboxylic groups, 109
catalytic coating, 130
CE (capillary electrophoresis), 219–28
cell biology, 120
cell culture, 217
ceramics:
capillaries, 63–6
curved substrate patterning, 67–9
LIGA concepts, 62–3
nanoscale resolution patterning, 69–70
oxide nanoarrays, 127–8
powder blasting, 38
processing, 59–70
soft-mold replication, 66–7
Ceraset Polysilazane (PSZ), 66–7
Cercanam (ceramic precursor), 68
cerium oxide (CeO2), 126
chemFET devices, 189–90
chemical sensors, 179–98
application fields, 180–2
biochemical information, 183–9
cell-based biosensors, 192–5
development methodology, 188–9
electrochemical arrays, 190–5
integrated chemFET devices, 189–90
integrated clinical diagnostics, 190–5
pH sensors, 189–90
chlorine-based gas mixtures, 26
chromium pattern transfer etch masks, 128–9
chucks (wafer dicing), 158
cleanroom facilities:
vapor deposition techniques, 20
clinical sensor diagnostics, 190–5
colloidal nanocrystals (NCs), 154
colloidal self-assembly, 112
compliance sensor technology, 155
compressed air systems, 159
computer aided design (CAD), 16
computer-assisted microneedle design studies, 264
conducting metal oxides, 127
conductometry, 186–7
confined synthesis templated techniques, 112
couplers (micromechanical), 162–5
cryo-Deep Reactive Ion Etching, 59
curved substrate ceramic patterning, 67–9
CVD see chemical vapour deposition
D
Datalogic Magellan 8500XT barcode scanners, 166
deep dry etching techniques, 21–2
deoxyribonucleic acid (DNA):
micromechanical transducers, 152
sensors, 191–2
device-to-world connections, 217–19
diabetes see insulin delivery
diaphragms:
micro-mechanical actuation, 209
micromechanical couplers, 162–5
packaged sensors, 157
dielectrics, 19
diffusion, 210
dip-coating, 78
direct microneedle approaches, 257–8
direct-write photolithography strategies, 17
direct-write scanning probe lithography, 101–2
DNA:
micromechanical transducers, 152
sensors, 191–2
dot pattern etchings, 117–18
DPN see dip-pen lithography
DRIE see Deep Reactive Ion Etching
drinking water supply networks, 184–5
drug delivery, 235–72
dry surface micromachining, 76
E
ECR (electron cyclotron resonance), 59
EDP see ethylenediamine perizine
egg-shell membranes (ESM), 129
elastomers, 40
electrical-field assisted nanofabrication, 109
electrochemical etching, 248
electrochemical oxide nanoarray processes, 128
electrodisposition batch-replication, 260–1
electrolytes, 186
electromagnetic actuators, 209
electron cyclotron resonance (ECR), 59
electronics industry, 103–4
electro-optic substrates, 71
electroosmotic fluid flow, 212
electropherograms, 226–7
electrophoresis, 222–3
see also capillary electrophoresis
embossing, 46–9
emerging nanolithographic technologies, 107–12
environmental pollution, 182
epitaxial deposition, 169
epitaxial growth, 77–8
ESM (egg-shell membranes), 129
etching techniques:
deep reactive ion, 59
integrated optics, 81
Laser Interference Lithography, 117–18
micro-mechanical actuation, 208
microneedle arrays, 248
non-silicon processing, 33–6
photolithography, 16
wet chemical, 75
etch stops, 30
EUV see extreme ultraviolet techniques
excimer laser ablation, 44
F
FACS see fluorescent-activated cell sorters
farming, 182
femtosecond laser micromachining principle, 44
fermentation processes, 217
fiber couplers, 166
fiber-(electro)spinning, 154–5
FIB (focused ion beam milling), 128–9
fibroblast cells, 111
filters (diffusion), 210
fine-grained polysilicon layers, 161
fine mechanically manufactured arrays, 241
fine-mechanical microneedle approaches, 257–8
finger stick sampling, 223
FlowScope, 158–60
flow-through cells, 184–5
flow-through devices, 201
see also capillary electrophoresis
flow-through microfluidic concepts, 202–3
see also microfluidics
fluorometric sensors, 183
focused ion beam (FIB) milling, 128–9
foundries (microsystems), 29
foundry service industry, 83–4
fused glass/silica materials, 154
G
gallium arsenide (GaAs) substrates, 153
galvanoforming processes, 41–2
galvo-mirrors, 166–7
gases:
Bosch processes, 32
micro-mechanical actuation, 209
genotype testing, 202
geometrically constrained inorganic templates, 111
geometric nanowells, 110
Germanium-doped silica layers, 81–2
glass:
cantilever components, 162–3
micro-ceramic processing, 70
micromechanical transducers, 154
microneedles, 247
photostructurable, 36–8
planar lightwave circuits, 77
wet etching, 33–6
glass transition temperature (Tg), 45–6
glucose oxidase (GOx), 126
gold interdigital electrode arrays, 192
guided self-assembly, 112
H
hafnium oxide, 130
HF see hydrofluoric acid
H-filters, 210
highly ordered oxide films, 128
highly ordered pyrolytic graphite (HOPG), 123
high-resolution nanoarrays, 107
HIV drug resistance evaluation, 202
HOPG see highly ordered pyrolytic graphite
hot embossing, 46–9
hot tap drilling, 159
hybrid-integrated glass cantilever components, 162–3
hybrid materials, 17
hybrid solutions, 172
hydraulic microactuators, 206
hydrofluoric acid (HF), 34–36
hydrophobic patches, 207
I
ICP (inductively coupled plasma) sources, 32
IDE see interdigital electrode arrays
IL see interference lithography
immunoglobulin, 152
inductively coupled plasma (ICP) sources, 32
information storage device nanofabrication, 72
information technology (IT), 165–72
infrared (IR) plastic microfabrication, 45
inorganic templates, 111
integrated boss-features, 162
integrated chemFET devices, 189–90
integrated clinical diagnostics, 190–5
integrated fabrication (surface micromachining), 26
integrated lab-on-a-chip systems see lab-on-a-chip systems
integrated microfluidic devices, 211–12
integrated optical devices:
fabrication, 81–3
MST foundry service industry, 83–4
silicon/non-silicon hybrid devices, 72–4
integrated wearable scanners, 166
intensive farming, 182
interdigital electrode (IDE) arrays, 192
in vitro pharmaceutical testing, 202
in vivo pharmaceutical testing, 202
see also e-beam lithography
ion lasers, 113
ion-sensitive field-effect transistors (ISFET), 189–90
iontophoresis, 223
IR see infrared
iron-oxide (Fe2O3), 154
IT (information technology), 165–72
K
L
label-free nanoarrays, 107
large scale integration (LSI), 19
laser ablation, 42–4
laser-based planar lightwave circuits, 74–5
lasers (Argon ion), 113
laser scanning systems, 166–7
laser silicon/non-silicon hybrid devices, 73–4
laser stereolithography, 17
leak-tide integration, 212
Leiden/Amsterdam Center for Drug Research (LACDR), 242
light-emitting diode-based detectors, 184–5
light sensitive compounds, 15
LIL see Laser Interference Lithography
see also Microneedle Array Technology
lithium tantalate, 169
lithography:
electronics industry, 103–4
LIGA concepts, 57–8
micromolding, 61
oxide nanoarrays, 128–9
photolithography, 14–17
low-cost masks, 16
low-loss alumina waveguide fabrication, 170–1
low-shrinkage ceramic precursors, 68
LPCVD see Low Pressure Chemical Vapour Deposition
M
magnetron sputtering, 170
Mapper Lithography, 99
maskless extreme ultraviolet lithography, 113–14
masks:
excimer laser ablation, 44
nanolithography, 100–2
nanomaterials, 128–9
optical devices, 81–3
planar lightwave circuits, 74–5
silicon micromachining, 21–2
master-based replication processes, 260–1
MATAS (Modular Assembly for (micro) Total Analysis systems), 217–19
mechanical transducers see micromechanical transducers
medical ordered oxide applications, 130–2
medical sensor array applications, 190–5
membrane-type materials, 187
mesa-structures, 162–3
metals:
microneedles, 253
thermal evaporation, 19
thin films, 17
meta-materials:
nanolithography, 97
nanoscale research, 125–7
oxide metamaterials, 124–7
oxide nanoarrays, 127–30
micro-abrasive blasting, 38–9
microarray sensor technology, 190–5
micro-ceramic processing, 59–70
capillaries, 63–6
curved substrate patterning, 67–9
nanoscale resolution patterning, 69–70
soft-mold replication, 66–7
microchip capillary electrophoresis, 219–28
microelectronics industry, 103–4
application fields, 201–4
components, 204–10
diffusion, 210
dispensing, 211–12
laser ablation, 44
sensing, 211–12
transport, 210–12
micro-hot embossing, 46–9
micromechanical actuation, 208–10
micromechanical transducers, 147–77
application fields, 150–3
information technology, 165–72
material overview, 153–4
microactuation, 155–7
packaged sensors, 157–60
resonant microdevices, 160–5
silicon, 160–5
thick/thin film hybrid materials, 154–5
micromolded ceramics, 60–2
micromolding in capillaries (MIMIC), 63–6
micromotors, 26–7
Microneedle Array (MNA) Technology, 237–65
clinical relevance, 259–65
demand, 241–4
microfabrication technologies, 244–52
research, 241
Micro (Opto) Electro Mechanical Systems (MEMS/MOEMS):
information technology, 165–72
integrated optical devices, 170
microfluidic components, 206
micromechanical actuation, 209
micromechanical transducers, 163
multiple-beamlet arrays, 107
photostructurable glass, 36
pressure sensors, 151
silicon/non-silicon hybrid devices, 73
microplate readers, 181–2
microscale aqueous microneedle conduits, 252
microsystem foundries, 29
microvalves (valves), 204–10
MIMIC (micromolding in capillaries), 63–6
Mirkin Research Group, 101–2
mirror projection displays, 167
mixers (microfluidics), 205
MNA see Microneedle Array Technology
Modular Assembly for (micro) Total Analysis systems (MATAS), 217–19
MOEMS see Micro (Opto) Electro Mechanical Systems
molecular recognition, 151–2
More-than-Moore concepts, 165
Motorola WT4000 scanners, 166
mounted diaphragms, 162–3
mounted single-use chips, 228
MST foundry service industry, 83–4
multi-exposures, 115–19
multiple e-beam/ion-beam lithography, 107
multireaders, 228
N
oxide metamaterials, 124–5
templated types, 107–12
template-free lithography, 103
nanohole-microarrays, 119
nanolithography:
electronics industry, 103–4
emerging technologies, 107–12
technique, 100–2
nanomaterials, 122–32
nanoporous microneedles, 248–50
nanoscale meta-material research, 125–7
nanoscale resolution ceramic patterning, 69–70
nanotechnology, 91–146
nanowells, 110
natural oxide nanoarrays, 123–4
NCs (colloidal nanocrystals), 154
needle systems see Microneedle Array Technology
neural stimulation, 124
nickel microneedles, 253
non-CMOS compatible cantilever devices, 163
non-lithographic direct shaping methods, 17
non-silicon hybrid devices, 71–4
non-silicon processing, 33–49
glass wet etching, 33–6
photostructurable glass, 36–8
plastic microfabrication, 39–49
powder blasting, 38–9
novel diagnostic nanoarrays, 131
novel product nanofabrication, 235–72
novel resist systems, 115–19
O
octadecyltrichlorisilane (OTS), 69
octadecyltrichlorsilane (ODTS), 130
Ohm’s law, 186
oligonucleotides, 152
on-chip optical absorbance, 185
on-chip polymerase chain reaction, 203
optical devices:
fabrication, 81–3
information technology, 167–72
MST foundry service industry, 83–4
silicon/non-silicon hybrid devices, 72–4
organic-capped iron-oxide (Fe2O3), 154
organic oxide arrays, 123
OTS (octadecyltrichlorisilane), 69
out-of-plane mirror elements, 166
oxide metamaterials, 124–7
oxide nanoarrays:
artificial, 123–4
background, 123–7
bio-inspired, 129–30
bio-templated, 129–30
definition, 123–7
fabrication principles, 127–30
lithographic-assisted, 128–9
natural, 123–4
oxides, 122–3
oxygenation, 129
P
parallel electron beam techniques, 17
parallel plate plasma etching, 25
parallel templated nanoarrays, 110
passive microvalves, 206–7
p-CAR pattern transfers, 117–18
PCB see printed circuit boards
PDMS see polydimethylsiloxane
PEEK see polyetheretherketone
perovskite lead zirconate titanate structures, 156
pharmaceuticals, 202
phenotype testing, 202
photomasks, 81–3
see also masks
photometric sensors, 183
photonic nanostructures, 130
photopolymerization, 44–5
photostructurable glass, 36–8
pH sensors, 189–90
piezoelectric actuators, 209
piezoelectrical materials, 33
piezoelectric discs, 162–3
piezoelectricity, 156
pipettes, 211
PI (polyimide), 43–4
planar flow-through cells, 184–5
plasma deposition processes, 26
plasma-enhanced chemical vapour deposition (PECVD):
thin films, 19
wet chemical etching, 22
plasma etch methods, 16
plasma polymerization, 78
plastic encapsulation, 158
plastic microfabrication, 39–49
laser ablation, 42–4
photopolymerization, 44–5
thermoplastic micromolding, 45–9
thick resist lithography, 40–2
plastic microneedles, 247
PLCs see planar lightwave circuits
PM see patterned magnetic media
PMMA see polymethylmetacrylate
pneumatic microactuators, 206
point-of-care (PoC) microfluidics, 220
point-of-care (PoC) tests, 222
point-of-sales bar code readers, 166
curved substrate patterning, 67–9
micro-mechanical actuation, 208–9
microneedle arrays, 263–4
plastic microfabrication, 40
soft-mold replication, 66
polyetheretherketone (PEEK), 43–4
polyimide (PI), 43–4
polymeric gels, 110
polymeric organic oxide arrays, 123
polymers:
ceramic microparts, 62
laser ablation, 42–4
photolithography, 15
photopolymerization, 44–5
planar lightwave circuits, 78–9
plastic microfabrication, 39–49
thermoplastic micromolding, 45–9
thick resist lithography, 40–2
thin films, 17
polymethylmetacrylate (PMMA):
laser ablation, 44
template nanoarrays, 111
polypyrrole (PPy), 123
polysulfone (PSU), 43–4
polytetrafluoroethene (PTFE), 124
polyvinylsilazane, 66
portable scanning systems, 166–7
powder blasting, 38–9
power splitters, 168
PPy (polypyrrole), 123
precursor resins, 60
printed circuit boards (PCB):
micromechanical coupler diaphragms, 163
proteins:
nanoarrays, 107
templating, 110–11
transducers, 152
PSU (polysulfone), 43–4
PSZ (Ceraset Polysilazane), 66–7
PTFE (polytetrafluoroethene), 124
pumps (microfluidics), 205
purpose-built materials, 127
PVD see physical vapour deposition
PZT see lead zirconate titanate
Q
R
random access memory (RAM), 106
rapid prototyping print processes, 154–5
reactive gas species, 26
Bosch processes, 32
dry etching, 24–5
optical device fabrication, 81
planar lightwave circuits, 76
receptor-ligand binding, 152
resist systems:
Laser Interference Lithography, 115–20
nanotechnology, 100
plastic microfabrication, 40–2
wet deposition techniques, 18
resonant microdevices, 160–5
resonant mirror components, 167–8
retail barcode scanners, 166
reverse iontophoresis, 223
rhenium oxide films, 126
RIE see reactive ion etch processes
rod-shaped Tobacco mosaic viruses, 130
S
sacrificial master-based replication, 260–1
sacrificial silica layers, 26–7
sample cassettes, 228
samples (microfluidics), 224–6
sample to chip interfaces, 224
SAMs see self-assembled monolayers
sapphire (A2O3) substrates, 153
SAW see surface acoustic waves
SBL (styrene butadiene copolymer latex), 62
scanning electron micrography (SEM), 117–18
Scotch tape, 70
selective electrochemical etching, 248
semiconductors:
optical device fabrication, 81
pH sensor devices, 189–90
silicon/non-silicon hybrid devices, 73–4
thin films, 17
sensors:
application fields, 180–2
biochemical information, 183–9
cell-based biosensors, 192–5
development methodology, 188–9
diffusion, 210
electrochemical arrays, 190–5
integrated chemFET devices, 189–90
integrated clinical diagnostics, 190–5
nanomaterials, 124
pH sensors, 189–90
resonant microdevices, 161–2
signal transduction systems, 182
silica:
micromechanical transducers, 154
thin films, 17
silica-on-silicon, 79
silicon:
bulk micromachining, 28–32
hybrid devices, 71–4
information technology, 169–71
micromachined arrays, 241
micromachining, 21–32
micromechanical actuation, 208
oxide nanoarrays, 130
planar lightwave circuits, 77
pressure sensors, 158
silicon dioxide etching, 76
silicon nitride, 17
Silicon-on-Insulator (SOI) speciality devices, 71
silicon oxide, 123–4
single-stranded DNA (ssDNA), 109
single-tip pipettes, 211
single-use chips, 228
single-wall carbon nanotubes (SWNTs), 109
slab waveguides, 75
SMD (surface mounted devices), 151
soft-bake processes, 18
soft-mold replication, 66–7
SOI (Silicon-on-Insulator speciality devices), 71
speciality substrates, 71
spin-on-glass processes, 169
spin-on processes, 79
splitter-type elements, 206
spot-size transformers, 169
SPR (surface plasmon resonance), 127
SRAM (static random access memory), 106
ssDNA (single-stranded DNA), 109
stand-alone readers, 228
static random access memory (SRAM), 106
step-wise bioredox, 129
stop valves, 207
storage device nanofabrication, 72
styrene butadiene copolymer latex (SBL), 62
subtractive pattern transfers, 74–5
surface micromachining, 25–8
information technology, 167–8
micro-mechanical actuation, 210
planar lightwave circuits, 76
surface mounted devices (SMD), 151
surface plasmon resonance (SPR), 127
surgery microfluidics, 220–2
SWNTs (single-wall carbon nanotubes), 109
T
TBAF (tetrabutylammoniumfluoride), 66
temperature:
micromechanical transducers, 156–7
plastics, 45–9
templated nanoarrays, 107–12
template-free lithography approaches, 103
tetrabutylammoniumfluoride (TBAF), 66
tetrahydrofuran (THF), 66
therapy (nanoarrays), 131–2
thermal evaporation, 19
thermoplastic micromolding, 45–9
thermosetting polymers, 40
THF (tetrahydrofuran), 66
thick film hybrid materials, 154–5
thick resist lithography, 40–2
thin films, 17–21
hybrid materials, 154–5
integrated optical devices, 74
magnetron sputtering, 170
micro-mechanical actuation, 208
vapor deposition techniques, 18–21
wet deposition techniques, 18
three-dimensional architectural protein templating, 110–11
three-dimensional masking, 21–2
three-dimensional microstructures, 41
timed etching, 30
time-to-market transit, 105
tin oxide (SnO2), 126
titania, 111
titer plates, 203
Tobacco mosaic viruses, 130
transdermal insulin delivery see insulin delivery
transducers see micromechanical transducers
tricalcium silicate, 62
T-sensors, 210
two-photon photopolymerization approaches, 44–5
U
ultimate resolution, 96
ultraviolet (UV):
photopolymerization, 45
plastic microfabrication, 41–2
UV-LIGA concepts, 41–2
V
valves (microfluidics), 205–10
venipuncture, 222
visible light waveguides, 76–7
VPFlowScope, 158–60
W
wafer dicing, 158
watch gears, 42
water supply networks, 184
wet deposition techniques, 18
wet surface micromachining, 76
wicking paper, 210
X
Z
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