Table of Contents

Cover image

Title page

Copyright

List of contributors

About the editor

Preface

1. Modeling of micro- and nano-scale cutting

Abstract

1.1 Introduction

1.2 Modeling of microscale cutting

1.3 Modeling of nanoscale cutting

Conclusions

References

2. Machining scale: Workpiece grain size and surface integrity in micro end milling

Abstract

2.1 Introduction

2.2 Specific cutting energy

2.3 Size effect

2.4 Workpiece microstructure scale

2.5 Surface integrity

References

3. Micromachining technique based on the orbital motion of the diamond tip

Abstract

3.1 Introduction

3.2 Principle of micromachining using the orbital motion of the diamond tip

3.3 Micromachining setup and test of the stage’s trajectory

3.4 Micromachining mechanism using the orbital motion of the tip

3.5 Formation mechanism and control methods of burrs

3.6 Effects of the processing parameters and fabrication of microstructures

3.7 Summary and future works

Acknowledgments

References

4. Microelectrical discharge machining of Ti-6Al-4V: Implementation of innovative machining strategies

Abstract

4.1 Introduction

4.2 Principle of electrical discharge machining

4.3 Overview of micro-EDM

4.4 Differences between EDM and micro-EDM

4.5 System components of micro-EDM

4.6 Micro-EDM process parameters

4.7 Performance criteria in micro-EDM

4.8 Titanium alloys as advanced engineering materials

4.9 Literature review of micro-EDM of Ti-6Al-4V

4.10 Investigation of micro-EDM process employing innovative machining strategies

Conclusions

Acknowledgements

References

5. Microelectrochemical machining: Principle and capabilities

Abstract

5.1 Fundamentals of microelectrochemical machining

5.2 Variety of micro-ECM processes

5.3 Hybrid processes associated with microelectrochemical machining

5.4 Conclusions

Acknowledgment

References

6. Microchannel fabrication via direct laser writing

Abstract

6.1 Introduction

6.2 Important materials for MEMS and microfluidic devices

6.3 Lasers for microfabrication

6.4 Material removal mechanisms

6.5 Laser microprocessing of materials

6.6 Challenges and future of laser processing

References

7. Underwater pulsed laser beam cutting with a case study

Abstract

7.1 Introduction

7.2 Laser as a machine tool

7.3 Laser material interaction

7.4 Laser beam cutting

7.5 Underwater laser beam machining

7.6 Pulsed IR laser ablation of Inconel 625 superalloy at submerged condition: A case study

Conclusion

Acknowledgment

References

8. Glass molding process for microstructures

Abstract

8.1 Application of microstructures

8.2 Fundamental of glass molding technique

8.3 Modeling and simulation of microstructure molding

8.4 Glass molding process for microstructures

8.5 Summary

References

Index

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