Contents

Preface

Chapter 1. Introduction

Chapter 2. Atomic/Molecular Assembling Technologies

2.1 Similarity of Electronic Waves to Light Waves

2.2 Scanning Tunneling Microscopy (STM)

2.2.1 Atomic Manipulation Process

2.2.2 Detection of Wavefunctions

2.2.3 Quantum Corral and Quantum Mirage

2.3 Molecular Beam Epitaxy (MBE)

2.3.1 Growth Mechanism of MBE

2.3.2 High-Electron-Mobility Transistors

2.3.3 Multiple Quantum Well Light Modulators

2.3.4 Relationships to Other Growth Techniques

2.4 Atomic Layer Deposition (ALD)

2.5 Plasma Chemical Vapor Deposition (Plasma CVD)

2.5.1 Amorphous Superlattices

2.5.2 Characterization of the a-SiNx:H/a-Si:H Interface

2.5.2.1 Sample Preparation

2.5.2.2 Measurements

2.5.2.3 Optical/Electrical Properties of a-SiNx:H layers

2.5.2.4 Photoluminescence Spectra

2.5.3 Transfer-Doping and Electron-Trapping Effects in a-SiNx:H/a-Si:H Superlattices

2.5.3.1 Fabrication and Measurement Procedures

2.5.3.2 Transfer Doping

2.5.3.3 Electron Trapping

2.6 Sputtering

2.6.1 Electrochromism in WOx Thin Films

2.6.2 Enhancement of Coloration Efficiency in WOx with Controlled Film Structures

2.7 Vacuum Deposition Polymerization

References

Chapter 3. Fundamentals of Molecular Layer Deposition (MLD)

3.1 Concept of MLD

3.1.1 MLD Utilizing Chemical Reactions

3.1.2 MLD Utilizing Electrostatic Force

3.1.3 MLD with Molecule Groups

3.2 MLD Equipment

3.2.1 Gas-Phase MLD

3.2.1.1 K Cell–Type MLD

3.2.1.2 Carrier Gas–Type MLD

3.2.2 Liquid-Phase MLD

3.2.2.1 Fluidic-Circuit Type MLD

3.3 Proof of Concept of MLD

3.3.1 MLD Utilizing Chemical Reactions

3.3.1.1 Polyimide

3.3.1.2 Conjugated Polymers

3.3.2 MLD Utilizing Electrostatic Force

3.3.2.1 Stacked Structures of p-Type and n-Type Dye Molecules on ZnO Surfaces

3.3.2.2 Molecular Crystals

3.4 MLD with Controlled Growth Orientations and Locations

3.4.1 Growth Control by Seed Cores

3.4.1.1 MLD from SAM

3.4.1.2 Organic CVD from SAM

3.4.2 Monomolecular Step Polymer Wire Growth from Seed Cores

3.5 High-Rate MLD

3.5.1 Influences of Molecular Gas Flow on Polymer Film Growth

3.5.2 Domain-Isolated MLD

3.6 Selective Wire Growth

3.6.1 Selective Growth on Surfaces with Patterned Treatment

3.6.2 Selectively-Aligned Growth on Atomic-Scale Anisotropic Structures

3.6.2.1 Concept

3.6.2.2 Growth

3.6.2.3 Optical Characterization for Selective Alignment of Polymer Wires

3.6.3 Electric-Field-Assisted Growth

3.6.4 Head-to-Tail Growth

3.7 Mass Production Process for Nano-Scale Devices Fabricated by MLD

3.8 Examples of Goals Achieved by MLD

3.8.1 Functional Organic Devices

3.8.2 Integrated Nano-Scale Optical Circuits

3.8.3 Molecular Circuits

References

Chapter 4. Fabrication of Multiple-Quantum Dots (MQDs) by MLD

4.1 Fundamentals of Quantum Dots

4.2 Quantum Dot Construction in Conjugated Polymers by MLD

4.2.1 MQD Fabrication by Arranging Two Kinds of Molecules

4.2.2 MQDs Fabricated by Arranging Three Kinds of Molecules

References

Chapter 5. Theoretical Predictions of Electro-Optic (EO) Effects in Polymer Wires

5.1 Molecular Orbital Method

5.2 Nonlinear Optical Effects

5.3 Procedure for Evaluation of the EO Effects by the Molecular Orbital Method

5.4 Qualitative Guidelines for Improving Optical Nonlinearities

5.4.1 For Second-Order Optical Nonlinearity

5.4.2 For Third-Order Optical Nonlinearity

5.5 Enhancement of Second-Order Optical Nonlinearity by Controlling Wavefunctions

5.5.1 Effects of Wavefunction Shapes

5.5.2 Effects of Conjugated Wire Lengths

5.5.3 Relationship between Wavefunctions and Transition Dipole Moments

5.5.4 Optical Nonlinearity in Conjugated Wires with Poly-AM Backbones

5.5.5 Enhancement of Optical Nonlinearity by Sharpening Absorption Bands

5.6 Enhancement of Third-Order Optical Nonlinearity by Controlling Wavefunctions

5.7 Multiple Quantum Dots (MQDs) in Conjugated Polymer Wires

References

Chapter 6. Design of Integrated Optical Switches

6.1 Variable Well Optical ICs (VWOICs) and Waveguide Prism Deflectors (WPDs)

6.1.1 Design of VWOIC

6.1.2 Design of WPD Optical Switch Utilizing the Pockels Effect

6.1.2.1 Simulation Procedure

6.1.2.2 Structural Model

6.1.2.3 Simulated Performance

6.1.3 Design of WPD Optical Switch Utilizing the Kerr Effect

6.1.3.1 Simulation Procedure

6.1.3.2 Structural Model

6.1.3.3 Simulated Performance

6.1.4 Impact of Polymer MQDs on Optical Switch Performance

6.1.5 Future Integration Issues

6.1.6 Experimental Demonstration of WPD Utilizing PLZT

6.2 Nano-Scale Optical Switches

6.2.1 Ring Resonator Optical Switches

6.2.2 Bandwidth Limit in Photonic Crystal Waveguides

6.2.3 Polymer MQDs in Nano-Scale Optical Switches

References

Chapter 7. Organic Photonic Materials, Devices, and Integration Processes.... 183

7.1 Electro-Optic (EO) Materials

7.1.1 Characterization Procedure for the Pockels Effect in Organic Thin Films

7.1.2 Molecular Crystals

7.1.2.1 SPCD

7.1.2.2 MNA

7.1.3 Poled Polymers and Optical Switches

7.1.3.1 EO Effects in Poled Polymers

7.1.3.2 EO Polyimide

7.1.3.3 Optical Switches Using EO Polyimide

7.1.3.4 3-D Optical Switches

7.2 Optical Waveguides Fabricated by Selective Wire Growth

7.2.1 EO Waveguides Fabricated by Electric-Field- Assisted Growth

7.2.1.1 Epoxy-Amine Polymer

7.2.1.2 Poly-Azomethine

7.2.2 Conjugated Polymer Waveguides Fabricated on Anisotropic Surface Structures

7.2.3 Acceptor Substitution into Conjugated Polymer Wires

7.3 Nano-Scale Waveguides of Photo-Induced Refractive Index Increase Sol-Gel Materials

7.3.1 Fabrication Process

7.3.2 Linear Waveguides

7.3.3 S-Bending and Y-Branching Waveguides

7.3.4 Fine 3-D Structures for All-Air-Clad Waveguides

7.4 Self-Organized Lightwave Network (SOLNET) for Self-Aligned Optical Couplings and Vertical Waveguides

7.4.1 The SOLNET Concept

7.4.2 Proof of Concept of SOLNET

7.4.2.1 One-Beam-Writing SOLNET

7.4.2.2 Two-Beam-Writing SOLNET

7.4.2.3 R-SOLNET

7.5 Resource-Saving Heterogeneous Integration

7.5.1 Concept of PL-Pack with SORT

7.5.2 Advantages of PL-Pack with SORT

7.5.2.1 Resource Saving

7.5.2.2 Process Simplicity

7.5.2.3 Thermal Stress Reduction

7.5.3 Experimental Demonstrations of SORT

7.5.3.1 SORT of Polymer Waveguide Lenses

7.5.3.2 SORT of Optical Waveguides

7.6 Optical Waveguide Films with Vertical Mirrors and 3-D Optical Circuits

7.6.1 Optical Waveguide Films with Vertical Mirrors

7.6.2 3-D Optical Circuits

7.6.2.1 Type 1: Stacked Waveguide Films with 45° Mirrors

7.6.2.2 Type 2: Waveguide Films with Vertical Waveguides of SOLNET

References

Chapter 8. Applications to Optical Interconnects and Optical Switching Systems

8.1 3-D Optoelectronic (OE) Platform Based on Scalable Film Optical Link Module (S-FOLM)

8.2 Optical Interconnects within Boxes

8.2.1 Multilayer OE Boards and 3-D Stacked OE Multi-Chip Modules

8.2.2 OE Amplifier/Driver-Less Substrate (OE-ADLES)

8.2.3 Impact of Polymer MQDs on OE-ADLES

8.3 3-D Micro Optical Switching System (3D-MOSS)

8.3.1 The 3D-MOSS Concept

8.3.2 Implementation of SOLNET in 3D-MOSSs

8.3.3 Structural Model of 3D-MOSS

8.3.4 Optical Z-Connections and Optical Switches

8.3.4.1 Optical Z-Connections

8.3.4.2 Optical Switches

8.3.5 Predicted Performance of 3D-MOSS

8.3.5.1 Size and Insertion Loss

8.3.5.2 Electrical Characteristics

8.3.6 Impact of Nano-Scale Waveguides and Polymer MQDs on 3D-MOSS Performance

References

Chapter 9. Applications to Solar Energy Conversion Systems

9.1 Sensitized Photovoltaic Devices

9.1.1 Concept of Multidye Sensitization and Polymer- MQD Sensitization

9.1.2 Waveguide-Type Photovoltaic Device Concept

9.1.3 Proof of Concept of Multidye Sensitization by Liquid-Phase MLD

9.1.3.1 Spectral Sensitization of ZnO by p/n- Stacked Structures

9.1.3.2 Sensitization by p/n-Stacked Structures Constructed by Liquid-Phase MLD

9.1.4 Proof of Concept of Polymer-MQD Sensitization

9.1.5 Proof of Concept of Waveguide-Type Photovoltaic Devices

9.2 Integrated Solar Energy Conversion Systems

9.2.1 Concept of Integrated Solar Energy Conversion Systems

9.2.2 The Integrated Photonic/Electronic/Chemical System (IPECS)

9.2.3 Structures of Light Beam Collecting Films

9.2.4 Design of Light Beam Collecting Films

9.2.4.1 Simulation Procedure

9.2.4.2 Tapered Vertical/Horizontal Waveguide-Type Light Beam Collecting Films

9.2.4.3 Multilayer Waveguide-Type Light Beam Collecting Films

9.2.5 Possible Fabrication Process

9.2.6 Impact of Polymer MQDs on Integrated Solar Energy Conversion Systems

9.3 Novel Structures of Photovoltaic and Photosynthesis Devices

9.4 Waveguide-Type Photovoltaic Devices with a Charge Storage/Photosynthesis Function

References

Chapter 10. Proposed Applications to Biomedical Photonics

10.1 Therapy for Cancer Utilizing Liquid-Phase MLD

10.1.1 Photodynamic Therapy Using Two-Photon Absorption with Different Wavelenghts

10.1.2 In-Situ Synthesis of a Drug within Human Bodies

10.2 Indicator for Reflective or Emissive Targets Utilizing R-SOLNET

10.3 Integrated Photoluminescence Analysis Chips

10.4 Molecular Recognition Chip References

Epilogue

Index

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