180 Design of CMOS Millimeter-Wave and Terahertz Integrated Circuits
Figure 7.29: On-chi p implementation of CRLH T-line (metamaterial)
to realize zero-phase shift in standard CMOS technology for the 60
GHz PA prototype with differential 2×4 distributed power combining
network.
drivers; and a 2×4 distributed power combining array is in the 3
rd
stage,
which has 2 power-combining branches with each branch being a differential
2-stage distributed PA. Each transistor is in a common-source (CS) topology
with size of 30×1µm/60nm for the first stage; and 60x1µm/60wm for the sec-
ond and third stages . With a biasing current of 14mA, the simulated f
mai
for
the 60µm transistor is 231GHz. After adjusted in-phase by ZPS, all horizon-
tal distributed amplifica tion branches ar e vertically combined by transformers,
which simultaneously perform the impedance transformation. Under the dif-
ferential structure, transformers are also adopted for inter-stage matching.
Note one additional compact matching network is used for inter-stage match-
ing between the 2
nd
and 3
rd
stages, which may be merged into the differential
ZPS design in the gate line to further reduce area and loss. Moreover, the
stabilization is realized by c ompact neutralization c apacitors.
7.4.2.2 Simulation and Measurement Results
The design is verified by EM s imulation (ADS-Momentum) before fabrication.
Figure 7.31 s hows the chip micrograph with an active area of 0.268 mm
2
. It is
measured on CASCADE Microtech Elite-300 probe station and Agilent PNA-
X (N5247A) with frequency-sweep up to 110 GHz. Measurement is done at
the center frequency (63 GHz) with pads de-embedded.
Figure 7.32 shows the measured S parameters with an open-short de-
embedding performed. One can observe that the power gain S21 is 13.2 dB
at 63 GHz with the 3-dB bandwidth of 20 GHz (53 to 73 GHz). The PA is
unconditionally stable over the entire measured frequency range.